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Shenzhen Nano-Max Machinery Tech CO.,Ltd |
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Chem-mechanical Polishing (CMP) |
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Chem-mechanical polishing (CMP) is a technique that combines both chemical and mechanical polishing principles to achieve uniform removal rates of a highly composite specimen (such as integrated circuit device fabrication). CMP is typically done using a hard polyurethane polishing pad combined with a slurry of finely dispersed alumina or silica particles in an alkaline solution. CMP combines the selectivity of chemical polishing with the mechanical removal properties of standard mechanical polishing techniques. The two combined give excellent selectivity and planarity and can be tailored to many different materials. |
[add time:2011.01.07 ] |
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Nano-Max Machinery Tech |
ADD:2F,Tower C,No.64 Xiakeng 2Rd,Tongle Cun,Longgang District,ShenzhenTel:86-755-89640403/89642658 Fax:86-755-89640389 |
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